This page shows usage statistics for the item: Characterization of low-temperature bulk micromachining of silicon using an SF6/O2 inductively coupled plasma

Usage statistics for all items by each of this item's authors:

Click on a number to switch between file downloads and item page views or to view usage statistics for a different date range.

Currently showing: File downloads; All dates

File downloadsItem page views
Current month10
Previous month51
All dates64120
Custom date range
to

Maximum number of items/collections/authors etc. shown:

Top visitors' geographic locations

Click on a country's usage number to view usage statistics for visits from that country.

Currently showing: File downloads; All dates

Top country views

File downloads
Germany9
Japan8
South Korea8
China4
Taiwan4
United States3
Canada2
France2
Sweden2
Switzerland1

Top cities views

File downloads
Seoul5
Beijing4
Sendai4
Aachen2
Taipei2
Bangalore1
Erlangen1
Gothenburg1
Hillsboro1
Hsinchu1